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Institution	Date	Title	Author
國立交通大學	2014-12-12T02:13:46Z	電子迴旋共振化學氣相沉積之氧化矽膜及鎢在六氟化硫,氟化氮與氮氣的電漿蝕刻	林明杰; Ming-Jyer Lin; 張國明; Kow-Ming Chang

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