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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
南台科技大學 2001 Decomposition of SF6 in the O2/Ar RF Plasma Environment 廖渭銅; Shih; Minliang ; Lee; Wen-Jhy ;Chen; Chuh-Yung ;Liao; Wei-Tung ;Tsai; Cheng-Hsien

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