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| 臺大學術典藏 |
2018-09-10T08:42:00Z |
In situ beam drift detection using a two-dimensional electron-beam position monitoring system for multiple-electron-beam-direct-write lithography
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Tsai, Kuen-Yu; Ng, Philip C.W.; Ng, Hoi-Tou; Liu, Chun-Hung; Shen, Yu-Tian; Kuan, Chieh-Hsiung; Chen, Yung-Yaw; Kuo, Yi-Hung; Wu, Cheng-Ju; Yen, Jia-Yush; Chen, S.-Y.; CHIEH-HSIUNG KUAN; Tsai, Kuen-Yu; YUNG-YAW CHEN; JIA-YUSH YENet al. |
| 國立臺灣大學 |
2011 |
In situ beam drift detection using a two-dimensional electron-beam position monitoring system for multiple-electron-beam-direct-write lithography
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Chen, Sheng-Yung; Tsai, Kuen-Yu; Ng, Philip C.W.; Ng, Hoi-Tou; Liu, Chun-Hung; Shen, Yu-Tian; Kuan, Chieh-Hsiung; Chen, Yung-Yaw; Kuo, Yi-Hung; Wu, Cheng-Ju; Yen, Jia-Yush |
| 國立臺灣大學 |
2009 |
基於直接蒙地卡羅方法之電子束微影圖像模擬及其於電子光學系統優化設計之應用
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伍海濤; Ng, Hoi-Tou |
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