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Institution	Date	Title	Author
臺大學術典藏	2020-01-06T03:08:39Z	Comparison of model and experiment for Ar, Ar/O2 and Ar/O 2/Cl2 inductively coupled plasmas	Hsu, C.-C.; Nierode, M.A.; Coburn, J.W.; Graves, D.B.; JERRY CHENG-CHE HSU

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