臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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	Repositories
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	2019臺灣學術機構典藏研討會
	機構典藏系統RC7版本已發佈

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	機構典藏計畫網站
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	臺大學術典藏NTU Scholars

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Institution	Date	Title	Author
國立中山大學	2005	Damage effect of fluorine implantation on PECVD alpha-SiOC barrier dielectric	F.M. Yang;T.C. Chang;P.T. Liu;C.W. Chen;Y.H. Tai;J.C. Lou
國立中山大學	2005	An interfacial investigation of high dielectric constant material hafnium oxide on Si substrate	S.C. Chen;J.C. Lou;C.H. Chien;P.T. Liu;T.C. Chang
國立中山大學	2005	High performance hydrogenated amorphous Si TFT for AMLCD and AMOLED	C.W. Chen;T.C. Chang;P.T. Liu;T.Y. Tseng
國立中山大學	2005	Leakage conduction behavior in electron-beam-cured nanoporous silicate films	P.T. Liu;T.M. Tsai;T.C. Chang
國立中山大學	2005	A novel distributed charge storage element fabricated by the oxidation of amorphous silicon carbide	T.C. Chang;S.T. Yan;Y.T. Chen;P.T. Liu;S.M. Sze
國立中山大學	2005	Electrical degradation of n-channel poly-si TFT under AC stress	C.W. Chen;T.C. Chang;P.T. Liu;H.Y. Lu;C.F. Weng;C.W. Hu;T.Y. Tseng
國立中山大學	2005	Effects of channel width on electrical characteristics of polysilicon TFTs with nanowire channel	Y.C. Wu;T.C. Chang;P.T. Liu;C.S. Chen;C.H. Tu;H.W. Zan;Y.H. Tai;C.Y. Chang
國立中山大學	2005	Reduction of leakage current in metal-induced lateral crystallization polysilicon TFTs with dual-gate and multiple nanowire channel	Y.C. Wu;T.C. Chang;P.T. Liu;C.W. Chou;Y.C. Wu;C.H. Tu;C.Y. Chang
國立中山大學	2005	Electron charging and discharging effects of tungsten nanocrystals embedded in silicon dioxide for low voltage nonvotatile memeory technology	T.C. Chang;P.T. Liu;S.T. Yan;S.M. Sze
國立中山大學	2005	Effects of channel width and NH3 plasma passivation on electrical characteristics of polysilicon thin-flim transistors by pattern-dependent metal-induced lateral crystallization	Y.C. Wu;T.C. Chang;C.W. Chen;Y.C. Wu;P.T. Liu;C.H. Tu;C.Y. Chang
國立中山大學	2005	Memeory effect of oxide/ oxygen-incorporated silicon carbide/ oxide sandwiched structure	T.C. Chang;P.T. Liu;S.T. Yan;F.M. Yang;S.M. Sze
國立中山大學	2005	Enhanced performance of poly-Si thin film transistors using fluorine ion implantation	C.H. Tu;T.C. Chang;P.T. Liu;H.W. Zan;Y.H. Tai;Y.C. Wu;C.Y. Chang
國立中山大學	2005	Mobility enhancement of polycrystalline-Si thin-film transistor using nanowire channels by pattern-dependent metal-induced lateral crystallization	Y.C. Wu;T.C. Chang;P.T. Liu;Y.C. Wu;C.W. Chou;C.Y. Chang
國立中山大學	2004	Method to improve chemical-mechanical-planarization polishing rate of low-k methyl-silsesquiazane for ultralarge scale integrated interconnect application	T.C. Chang;T.M. Tsai;P.T. Liu;S.T. Yan;Y.C. Chang;H. Aoki;S.M. Sze;T.Y. Tseng
國立中山大學	2004	Study on the effect of electron beam curing on low-K porous organosilicate glass (OSG) material	T.C. Chang;T.M. Tsai;P.T. Liu;C.W. Chen;T.Y. Tseng
國立中山大學	2004	CMP of Ultra Low-k Material Porous-Polysilazane (PPSZ) for Interconnect Applications	T.C. Chang;T.M. Tsai;P.T. Liu;C.W. Chen;S.T. Yan;H. Aoki;Y.C. Chang;T.Y. Tseng
國立中山大學	2004	CMP of low-k methylsilsesquiazane with oxygen plasma treatment for multilevel interconnect applications	T.C. Chang;T.M. Tsai;P.T. Liu;C.W. Chen;S.T. Yan;H. Aoki;Y.C. Chang;T.Y. Tseng
國立中山大學	2004	CMP of ultra low-k material porous-polysilazane (PPSZ) for interconnect applications	T.C. Chang;T.M. Tsai;P.T. Liu;C.W. Chen;S.T. Yan;H. Aoki;T.Y. Tseng
國立中山大學	2004	A novel distributed charge storage with GeO2 nano-dots	T.C. Chang;S.T. Yan;P.T. Liu;C.H. Hsu;M.T. Tang;S.M. Sze
國立中山大學	2004	Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications	T.C. Chang;S.T. Yan;P.T. Liu;H. Aoki;S.M. Sze
國立中山大學	2004	Structrual characteristics and interfacial reactions of low dielectric constant porous polysilazane for Cu metallization	J.H. Wang;P.T. Liu;T.C. Chang;L.J. Chen
國立中山大學	2004	CMP of ultra low-k Methylsilsesquiazane with oxygen plasma treatment for multilevel interconnect applications	T.C. Chang;T.M. Tsai;P.T. Liu;C.W. Chen;S.T. Yan;H. Aoki;T.Y. Tseng
國立中山大學	2004	Method to improve chemical-mechanical-planarization polishing rate of low-k methyl-silsesquiazane for ultralarge scale integraged interconnect application	T.C. Chang;T.M. Tsai;P.T. Liu;Y.C. Chang;J. Aoki;S.M. Sze;T.Y. Tseng
國立中山大學	2004	Quasisuperlattice storage: A concept of multilevel charge stoage	T.C. Chang;S.T. Yan;P.T. Liu;C.W. Chen;H.H. Wu;S.M. Sze
國立中山大學	2004	Cu-penetration induced breakdown mechanism for a-SiCN	C.W. Chen;P.T. Liu;T.C. Chang;J.H. Yang;T.M. Tsai;H.H. Wu;T.Y. Tseng

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