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"palov alexander p"
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| 國立交通大學 |
2020-10-05T01:59:43Z |
Properties of organosilicate low-k films with 1,3-and 1,3,5-benzene bridges between Si atoms
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Liu, Chunhui; Lv, Chunguang; Kohler, Nicole; Wang, Xuesong; Lin, Hongxiao; He, Zhiwei; Wu, Yu-Hsuan; Leu, Jihperng; Wei, Shuhua; Zhang, Jing; Yan, Jiang; Palov, Alexander P.; Baklanov, Mikhail R. |
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