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"pan tj"
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| 國立交通大學 |
2014-12-08T15:39:18Z |
Influence of N2O plasma treatment on microstructure and thermal stability of WNx barriers for Cu interconnection
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Tsai, KC; Wu, WF; Chen, JC; Pan, TJ; Chao, CG |
| 國立交通大學 |
2014-12-08T15:37:09Z |
Numerical and experimental analysis of Cu diffusion in plasma-treated tungsten barrier
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Tsai, KC; Wu, WF; Chen, JC; Pan, TJ; Chao, CG |
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