臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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	2019臺灣學術機構典藏研討會
	機構典藏系統RC7版本已發佈

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Institution	Date	Title	Author
國立交通大學	2014-12-08T15:39:18Z	Influence of N2O plasma treatment on microstructure and thermal stability of WNx barriers for Cu interconnection	Tsai, KC; Wu, WF; Chen, JC; Pan, TJ; Chao, CG
國立交通大學	2014-12-08T15:37:09Z	Numerical and experimental analysis of Cu diffusion in plasma-treated tungsten barrier	Tsai, KC; Wu, WF; Chen, JC; Pan, TJ; Chao, CG

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