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"partanen j tuomi t yang d y le"
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| 東海大學 |
1992 |
Effects of various pre-intrinsic and phosphorus diffusion gettering treatments upon quality of Czochralski silicon wafer surface during a simulated 4 megabit dynamic random access memory process
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Partanen, J., Tuomi, T., Yang, D.-Y., Lee, H.-G., Kim, O.H., Hahn, S. |
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