臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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	Repositories
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	2019臺灣學術機構典藏研討會
	機構典藏系統RC7版本已發佈

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Institution	Date	Title	Author
臺大學術典藏	2021-08-05T02:41:49Z	Chamber Mismatching Calibration with Adjusted Run-to-Run Regulation in Semiconductor Manufacturing	Chouichi A;Blue J;Yugma C;Pasqualini F.; Chouichi A; Blue J; Yugma C; Pasqualini F.; JAKEY BLUE
臺大學術典藏	2020-03-02T06:40:07Z	Heterogranular multivariate analytics for detecting and controlling the root causes of the mismatching machines in semiconductor manufacturing	Chouichi, A.; Blue, J.; Yugma, C.; Pasqualini, F.; JAKEY BLUE
臺大學術典藏	2020-03-02T06:40:06Z	The detection and the control of machine/chamber mismatching in semiconductormanufacturing	Chouichi, A.; Blue, J.; Yugma, C.; Pasqualini, F.; JAKEY BLUE

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