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机构 日期 题名 作者
臺大學術典藏 2018-09-10T09:50:34Z Method for Compensating Proximity Effects of Particle Beam Lithography Processes Kuen-Yu Tsai;Chun-Hung Liu;Chooi-Wan Ng;Pei-Lin Tien; Kuen-Yu Tsai; Chun-Hung Liu; Chooi-Wan Ng; Pei-Lin Tien; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:50:34Z Method for Compensating Proximity Effects of Particle Beam Lithography Processes Kuen-Yu Tsai;Chun-Hung Liu;Chooi-Wan Ng;Pei-Lin Tien; Kuen-Yu Tsai; Chun-Hung Liu; Chooi-Wan Ng; Pei-Lin Tien; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:21Z Model-based proximity effect correction for electron-beam direct-write lithography Yu-Tian Shen; Kuen-Yu Tsai; KUEN-YU TSAI; Chun-Hung Liu;Pei-Lin Tien;Philip C. W. Ng;Yu-Tian Shen;Kuen-Yu Tsai; Chun-Hung Liu; Pei-Lin Tien; Philip C. W. Ng
臺大學術典藏 2018-09-10T08:18:21Z Model-based proximity effect correction for electron-beam direct-write lithography Yu-Tian Shen; Kuen-Yu Tsai; KUEN-YU TSAI; Chun-Hung Liu;Pei-Lin Tien;Philip C. W. Ng;Yu-Tian Shen;Kuen-Yu Tsai; Chun-Hung Liu; Pei-Lin Tien; Philip C. W. Ng
臺大學術典藏 2014-05 Method for Compensating Proximity Effect of Particle Beam Lithography Process (粒子束微影程序鄰近效應之補償方法) KUEN-YU TSAI; Pei-Lin Tien; Chooi-Wan Ng; Chun-Hung Liu; Kuen-Yu Tsai;Chun-Hung Liu;Chooi-Wan Ng;Pei-Lin Tien; Kuen-Yu Tsai
臺大學術典藏 2014-05 Method for Compensating Proximity Effect of Particle Beam Lithography Process (粒子束微影程序鄰近效應之補償方法) KUEN-YU TSAI; Pei-Lin Tien; Chooi-Wan Ng; Chun-Hung Liu; Kuen-Yu Tsai;Chun-Hung Liu;Chooi-Wan Ng;Pei-Lin Tien; Kuen-Yu Tsai

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