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Showing items 1-13 of 13 (1 Page(s) Totally)
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| 臺大學術典藏 |
2020-06-16T06:34:48Z |
The electrostatic potential inside the electron-optical systen with periodic boundary-value conditions
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Pei, T.-H.;Tsai, K.-Y.;Li, J.-H.; Pei, T.-H.; Tsai, K.-Y.; Li, J.-H.; KUEN-YU TSAI |
| 臺大學術典藏 |
2020-01-17T07:45:18Z |
A fully model-based methodology for simultaneously correcting EUV mask shadowing and optical proximity effects with improved pattern transfer fidelity and process windows
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Ng, P.C.W.; Tsai, K.-Y.; Lee, Y.-M.; Pei, T.-H.; Wang, F.-M.; Li, J.-H.; Chen, A.C.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:17Z |
Fresnel zone plate manufacturability analysis for direct-write lithography by simulating focusing and patterning performance versus fabrication errors
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Tsai, K.-Y.; Chen, S.-Y.; Pei, T.-H.; Li, J.-H.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:17Z |
Efficient scattering simulations for equivalent extreme ultraviolet mask multilayer structures by modified transmission line theory and finite-difference time-domain method
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Lee, Y.-M.; Li, J.-H.; Ng, P.C.W.; Pei, T.-H.; Wang, F.-M.; Tsai, K.-Y.; Chen, A.C.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:17Z |
Using transmission line theory to calculate equivalent refractive index of EUV mask multilayer structures for efficient scattering simulation by finite-difference time-domain method
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Lee, Y.-M.; Li, J.-H.; Ng, P.C.W.; Pei, T.-H.; Wang, F.-M.; Tsai, K.-Y.; Chen, A.C.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:17Z |
Stochastic simulation of photon scattering for EUV mask defect inspection
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Pei, T.-H.; Tsai, K.-Y.; Li, J.-H.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:12Z |
Simulation and experiment of speckle reduction by the beam splitting method on a pico-projection system
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Pei, T.-H.; Yeh, F.-C.; Tsai, K.-Y.; Li, J.-H.; Liu, Z.-R.; Hung, C.-L.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:11Z |
The electrostatic potential inside the electron-optical systen with periodic boundary-value conditions
|
Pei, T.-H.; Tsai, K.-Y.; Li, J.-H.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:10Z |
Comparison of the vectorial diffraction theory and Fraunhofer approximation method on diffractive images of Fresnel zone plates
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Pei, T.-H.; Tsai, K.-Y.; Li, J.-H.; JIA-HAN LI |
| 臺大學術典藏 |
2018-09-10T08:08:47Z |
Architecture for next generation massively parallel maskless lithography system (MPML2)
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Su, M.-S.;Tsai, K.-Y.;Lu, Y.-C.;Kuo, Y.-H.;Pei, T.-H.;Yen, J.-Y.; Su, M.-S.; Tsai, K.-Y.; Lu, Y.-C.; Kuo, Y.-H.; Pei, T.-H.; Yen, J.-Y.; YI-CHANG LU; KUEN-YU TSAI; JIA-YUSH YEN |
| 臺大學術典藏 |
2018-09-10T08:08:47Z |
Architecture for next generation massively parallel maskless lithography system (MPML2)
|
Su, M.-S.;Tsai, K.-Y.;Lu, Y.-C.;Kuo, Y.-H.;Pei, T.-H.;Yen, J.-Y.; Su, M.-S.; Tsai, K.-Y.; Lu, Y.-C.; Kuo, Y.-H.; Pei, T.-H.; Yen, J.-Y.; YI-CHANG LU; KUEN-YU TSAI; JIA-YUSH YEN |
| 臺大學術典藏 |
2018-09-10T07:36:10Z |
Preliminary design of a two-dimensional electron beam position monitor system for multiple-electron-beam-direct-write lithography
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Chen, S.-Y.;Tsai, K.-Y.;Ng, H.-T.;Fan, C.-H.;Pei, T.-H.;Kuan, C.-H.;Chen, Y.-Y.;Yen, J.-Y.; Chen, S.-Y.; Tsai, K.-Y.; Ng, H.-T.; Fan, C.-H.; Pei, T.-H.; Kuan, C.-H.; Chen, Y.-Y.; Yen, J.-Y.; CHIEH-HSIUNG KUAN; YUNG-YAW CHEN; KUEN-YU TSAI; JIA-YUSH YEN |
| 臺大學術典藏 |
2018-09-10T07:36:10Z |
Preliminary design of a two-dimensional electron beam position monitor system for multiple-electron-beam-direct-write lithography
|
Chen, S.-Y.;Tsai, K.-Y.;Ng, H.-T.;Fan, C.-H.;Pei, T.-H.;Kuan, C.-H.;Chen, Y.-Y.;Yen, J.-Y.; Chen, S.-Y.; Tsai, K.-Y.; Ng, H.-T.; Fan, C.-H.; Pei, T.-H.; Kuan, C.-H.; Chen, Y.-Y.; Yen, J.-Y.; CHIEH-HSIUNG KUAN; YUNG-YAW CHEN; KUEN-YU TSAI; JIA-YUSH YEN |
Showing items 1-13 of 13 (1 Page(s) Totally)
1
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