臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立臺灣大學	2010	Manufacturability analysis of a MEMS-based electron-optical system design for direct-write lithography	Chen, Sheng-Yung; Chen, Shin-Chuan; Chen, Hsing-Hong; Pei, Ting-Han; Tsai, Kuen-Yu
國立臺灣大學	2010	Fresnel zone plate manufacturability analysis for direct-write lithography by simulating focusing and patterning performance versus fabrication errors	Tsai, Kuen-Yu; Chen, Sheng-Yung; Pei, Ting-Han; Li, Jia-Han

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