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"peng cheng jien"
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| 國立臺灣大學 |
2008 |
A micrometer scale and low temperature PZT thick film MEMS process utilizing an aerosol deposition method
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Wang, Xuan-Yu; Lee, Chi-Yuan; Peng, Cheng-Jien; Chen, Pei-Yen; Chang, Pei-Zen |
| 臺大學術典藏 |
2008 |
A micrometer scale and low temperature PZT thick film MEMS process utilizing an aerosol deposition method
|
Chang, Pei-Zen; Wang, Xuan-Yu; Lee, Chi-Yuan; Peng, Cheng-Jien; Chen, Pei-Yen; Chang, Pei-Zen; Wang, Xuan-Yu; Lee, Chi-Yuan; Peng, Cheng-Jien; Chen, Pei-Yen |
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