|
English
|
正體中文
|
简体中文
|
0
|
|
???header.visitor??? :
51384139
???header.onlineuser??? :
1000
???header.sponsordeclaration???
|
|
|
|
???tair.name??? >
???browser.page.title.author???
|
"perng yc"???jsp.browse.items-by-author.description???
Showing items 1-4 of 4 (1 Page(s) Totally)
1
View [10|25|50] records per page
| 國立交通大學 |
2019-04-02T05:59:14Z |
Charging damages to gate oxides in a helicon O-2 plasma
|
Lin, W; Kang, TK; Perng, YC; Dai, BT; Cheng, HC |
| 國立交通大學 |
2014-12-08T15:49:04Z |
A novel two-step etching to suppress the charging damages during metal etching employing helicon wave plasma
|
Cheng, HC; Lin, W; Kang, TK; Perng, YC; Dai, BT |
| 國立交通大學 |
2014-12-08T15:48:55Z |
Effects of helicon-wave-plasma etching on the charging damage of aluminum interconnects
|
Lin, W; Kang, TK; Perng, YC; Dai, BT; Cheng, HC |
| 國立交通大學 |
2014-12-08T15:01:16Z |
Charging damages to gate oxides in a helicon O-2 plasma
|
Lin, W; Kang, TK; Perng, YC; Dai, BT; Cheng, HC |
Showing items 1-4 of 4 (1 Page(s) Totally)
1
View [10|25|50] records per page
|
