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Institution Date Title Author
義守大學 2014-10 An experimental study on dicing 28 nm low-k water using laser grooving technique Hsiang-Chen Hsu;Cheng-Jiun Han;Li-Ming Chu;Shih-Jeh Wu;Chih-Chiang Fu;Shen-Li Fu;Baojun Liu;Chen-Yi Wang;PoChun Jung

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