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| 臺大學術典藏 |
2018-09-10T08:42:00Z |
In situ beam drift detection using a two-dimensional electron-beam position monitoring system for multiple-electron-beam-direct-write lithography
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Tsai, Kuen-Yu; Ng, Philip C.W.; Ng, Hoi-Tou; Liu, Chun-Hung; Shen, Yu-Tian; Kuan, Chieh-Hsiung; Chen, Yung-Yaw; Kuo, Yi-Hung; Wu, Cheng-Ju; Yen, Jia-Yush; Chen, S.-Y.; CHIEH-HSIUNG KUAN; Tsai, Kuen-Yu; YUNG-YAW CHEN; JIA-YUSH YENet al. |
| 國立臺灣大學 |
2011 |
In situ beam drift detection using a two-dimensional electron-beam position monitoring system for multiple-electron-beam-direct-write lithography
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Chen, Sheng-Yung; Tsai, Kuen-Yu; Ng, Philip C.W.; Ng, Hoi-Tou; Liu, Chun-Hung; Shen, Yu-Tian; Kuan, Chieh-Hsiung; Chen, Yung-Yaw; Kuo, Yi-Hung; Wu, Cheng-Ju; Yen, Jia-Yush |
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