臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
南台科技大學	2008-09	Ion beam sputter deposited TiAlN films for metal–insulator–metal (Ba,Sr)TiO3 capacitor application	王聖璋; Sheng-Yi Lee; Sheng-Chang Wang; Jen-Sue Chen; Jow-Lay Huang
南台科技大學	2007-12	Effects of nitrogen partial pressure on electrical properties and thermal stability of TiAlN films by ion beam sputter deposition	王聖璋; Sheng-Yi Lee; Sheng-Chang Wang; Jen-Sue Chen; Jow-Lay Huang
南台科技大學	2006-11	Effects of deposition and post-annealing conditions on electrical properties and thermal stability of TiAlN films by ion beam sputter deposition	王聖璋; Sheng-Yi Lee; Sheng-Chang Wang; Jen-Sue Chen; Jow-Lay Huang

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