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Showing items 11-26 of 26  (2 Page(s) Totally)
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Institution Date Title Author
臺大學術典藏 2018-09-10T09:25:00Z Architecture and EOS Design Flow of a Multiple-Electron-Beam–Direct-Write System Considering Patterning Fidelity, Breakdown Effect Sheng-Yung Chen;Shiau-Yi Ma;Kuen-Yu Tsai; Sheng-Yung Chen; Shiau-Yi Ma; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:34Z Method for Adjusting Status of Particle Beams for Patterning A Substrate And System Using The Same Kuen-Yu Tsai;Sheng-Yung Chen; Kuen-Yu Tsai; Sheng-Yung Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:34Z Apparatus and Method for Estimating Change of Status of Particle Beams Kuen-Yu Tsai;Sheng-Yung Chen; Kuen-Yu Tsai; Sheng-Yung Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:34Z Method and Computer-Aided Design System Of Manufacturing An Optical System Kuen-Yu Tsai;Sheng-Yung Chen;Shih-Chuan Chen; Kuen-Yu Tsai; Sheng-Yung Chen; Shih-Chuan Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:33Z Lithography-patterning-fidelity-aware electron-optical system design optimization Sheng-Yung Chen; Hoi-Tou Ng; Shiau-Yi Ma; Hsing-Hong Chen; Chun-Hung Liu; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:33Z Lithography-patterning-fidelity-aware electron-optical system design optimization Sheng-Yung Chen; Hoi-Tou Ng; Shiau-Yi Ma; Hsing-Hong Chen; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:33Z System and Method for Estimating Change of Status of Particle Beams Kuen-Yu Tsai;Sheng-Yung Chen;Jia-Yush Yen;Yung-Yaw Chen;Chi-Hsiang Fan; Kuen-Yu Tsai; Sheng-Yung Chen; Jia-Yush Yen; Yung-Yaw Chen; Chi-Hsiang Fan; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:32Z Silicon photodiodes for electron beam position and drift detection in scanning electron microscopy and electron beam lithography system Kuen-Yu Tsai; Yung-Yaw Chen; KUEN-YU TSAI; YUNG-YAW CHEN; JIA-YUSH YEN; Sheng-Yung Chen; Jia-Yush Yen; Cheng-Ju Wu; Yi-Hung Kuo
臺大學術典藏 2018-09-10T08:18:26Z Iterative finite-difference method for analyzing fabrication errors of lens-misaligned electron-beam direct-write lithography system Yen-Min Lee;Jia-Han Li;Sheng-Yung Chen;Shiau-Yi Ma;Kuen-Yu Tsai;Tony W. H. Sheu;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Sheng-Yung Chen; Shiau-Yi Ma; Kuen-Yu Tsai; Tony W. H. Sheu; Jia-Yush Yen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:22Z Beam drift detection using a two-dimensional electron beam position monitor system for multiple-electron-beam–direct-write lithography Sheng-Yung Chen;Kuen-Yu Tsai;Hoi-Tou Ng;Chi-Hsiung Fan;Ting-Han Pei;Chieh-Hsiung Kuan;Yung-Yaw Chen;Yi-Hung Kuo;Cheng-Ju Wu;Jia-Yush Yen; Sheng-Yung Chen; Kuen-Yu Tsai; Hoi-Tou Ng; Chi-Hsiung Fan; Ting-Han Pei; Chieh-Hsiung Kuan; Yung-Yaw Chen; Yi-Hung Kuo; Cheng-Ju Wu; Jia-Yush Yen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:21Z Analysis of fabrication misalignment effects in a MEMS-based electron-optical system design for direct-write lithography Sheng-Yung Chen;Chieh-Chien Huang;Shin-Chuan Chen;Ting-Han Pei;Kuen-Yu Tsai; Sheng-Yung Chen; Chieh-Chien Huang; Shin-Chuan Chen; Ting-Han Pei; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:20Z Fresnel zone plate manufacturability analysis for direct-write lithography by simulating focusing and patterning performance versus fabrication errors Kuen-Yu Tsai; Sheng-Yung Chen; Ting-Han Pei; Jia-Han Li; KUEN-YU TSAI; Kuen-Yu Tsai;Sheng-Yung Chen;Ting-Han Pei;Jia-Han Li
臺大學術典藏 2018-09-10T08:18:19Z Manufacturability analysis of a micro-electro-mechanical systems–based electron-optical system design for direct-write lithography Sheng-Yung Chen;Shin-Chuan Chen;Hsing-Hong Chen;Kuen-Yu Tsai;Hsin-Hung Pan; Sheng-Yung Chen; Shin-Chuan Chen; Hsing-Hong Chen; Kuen-Yu Tsai; Hsin-Hung Pan; KUEN-YU TSAI
臺大學術典藏 2018-09-10T07:42:07Z Manufacturability analysis of a MEMS-based electron-optical system design for direct-write lithography Sheng-Yung Chen;Shin-Chuan Chen;Hsing-Hong Chen;Ting-Han Pei;Kuen-Yu Tsai;Hsin-Hung Pan; Sheng-Yung Chen; Shin-Chuan Chen; Hsing-Hong Chen; Ting-Han Pei; Kuen-Yu Tsai; Hsin-Hung Pan; KUEN-YU TSAI
臺大學術典藏 2018-09-10T06:38:05Z Design adn Fabrication of Multi Frequency Ultrasonic Annular Transducers Jian-Hung Liu; Sheng-Yung Chen; Pai-Chi Li; PAI-CHI LI
中原大學 2010-07-20 室內與室外定位之行動安全服務系統：應用於非營利組織 陳勝勇; Sheng-Yung Chen

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