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國立交通大學 2014-12-12T02:17:32Z 以化學氣相方式與濺鍍方式沉積氮化鉬擴散障礙層在極大型積體電路金屬化應用上之研究 劉家宏; Liu, Jiang-Huang; 孫喜眾, 蘇 翔; Shi-Chung Sun, Shyang Su

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