臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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	Repositories
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	2019臺灣學術機構典藏研討會
	機構典藏系統RC7版本已發佈

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	臺大學術典藏NTU Scholars

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Institution	Date	Title	Author
淡江大學	2005-05	Batch Sequencing for Run-to-Run Control: Application to Chemical Mechanical Polishing	Chen, Yih-hang; Su, An-jhih; Shiu, Sheng-jyh; Yu, Cheng-ching; Shen, Shih-haur
國立臺灣大學	2005	Batch Sequencing for Run-to-Run Control: Application to Chemical Mechanical Polishing	Chen, Yih-Hang; Su, An-Jhih; Shiu, Sheng-Jyh; Yu, Cheng-Ching; Shen, Shih-Haur
國立臺灣大學	2004	Multivariable control of multi-zone chemical mechanical polishing	Shiu, Sheng-Jyh; Yu, Cheng-Ching; Shen, Shih-Haur; Su, An-Jhih

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