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"shiu sheng jyh"
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| 淡江大學 |
2005-05 |
Batch Sequencing for Run-to-Run Control: Application to Chemical Mechanical Polishing
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Chen, Yih-hang; Su, An-jhih; Shiu, Sheng-jyh; Yu, Cheng-ching; Shen, Shih-haur |
| 國立臺灣大學 |
2005 |
Batch Sequencing for Run-to-Run Control: Application to Chemical Mechanical Polishing
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Chen, Yih-Hang; Su, An-Jhih; Shiu, Sheng-Jyh; Yu, Cheng-Ching; Shen, Shih-Haur |
| 國立臺灣大學 |
2004 |
Multivariable control of multi-zone chemical mechanical polishing
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Shiu, Sheng-Jyh; Yu, Cheng-Ching; Shen, Shih-Haur; Su, An-Jhih |
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