臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立臺灣科技大學	2003	Characteristics of Sputtered TaBx Thin Films as Diffusion Barriers Between Copper and Silicon	Shun-Tang Lin; Yu-Lin Kuo; Chiapyng Lee
國立臺灣科技大學	2003	Diffusion Barrier Properties of Sputtered TaNx Between Cu and Si Using TaN as the Target	Yu-Lin Kuo; Jui-Jen Huang; Shun-Tang Lin; Chiapyng Lee; W. H. Lee

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