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Showing items 1-5 of 5 (1 Page(s) Totally) 1 View [10|25|50] records per page
國立成功大學 |
2003-01-15 |
Thermo-mechanical behavior of thick PECVD oxide films for power MEMS applications
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Zhang, Xin; Chen, Kuo-Shen; Spearing, S.Mark |
國立成功大學 |
2002-07-15 |
Residual stress and fracture in thick tetraethylorthosilicate (TEOS) and silane-based PECVD oxide films
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Zhang, Xin; Chen, Kuo-Shen; Ghodssi, R.; Ayon, A. A.; Spearing, S. Mark |
國立成功大學 |
2002-06 |
Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)
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Chen, Kuo-Shen; Ayon, A. A.; Zhang, Xin; Spearing, S. Mark |
國立成功大學 |
2001-11 |
Large deflection analysis of a pre-stressed annular plate with a rigid boss under axisymmetric loading
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Su, Y. H.; Chen, Kuo-Shen; Roberts, D. C.; Spearing, S. Mark |
國立成功大學 |
2001-04 |
Structural design of a silicon micro-turbo-generator
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Chen, Kuo-Shen; Spearing, S. Mark; Nemeth, Noel N. |
Showing items 1-5 of 5 (1 Page(s) Totally) 1 View [10|25|50] records per page
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