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Institution Date Title Author
元智大學 Sep-22 Optimal Growth Conditions for Forming c-Axis (002) Aluminum Nitride Thin Films as a Buffer Layer for Hexagonal Gallium Nitride Thin Films Produced with In Situ Continual Radio Frequency Sputtering Wei-Sheng Liu; Balaji G; Sui-Hua Wu; Li-Cheng Huang; Chung-Kai Chi; Yu-Lun Jiang; Hsing-Chun Kuo
元智大學 Sep-22 Optimal Growth Conditions for Forming c-Axis (002) Aluminum Nitride Thin Films as a Buffer Layer for Hexagonal Gallium Nitride Thin Films Produced with In Situ Continual Radio Frequency Sputtering Wei-Sheng Liu; Balaji G; Sui-Hua Wu; Li-Cheng Huang; Chung-Kai Chi; Yu-Lun Jiang; Hsing-Chun Kuo
元智大學 Sep-22 Optimal Growth Conditions for Forming c-Axis (002) Aluminum Nitride Thin Films as a Buffer Layer for Hexagonal Gallium Nitride Thin Films Produced with In Situ Continual Radio Frequency Sputtering Wei-Sheng Liu; Balaji G; Sui-Hua Wu; Li-Cheng Huang; Chung-Kai Chi; Yu-Lun Jiang; Hsing-Chun Kuo
元智大學 Sep-22 Optimal Growth Conditions for Forming c-Axis (002) Aluminum Nitride Thin Films as a Buffer Layer for Hexagonal Gallium Nitride Thin Films Produced with In Situ Continual Radio Frequency Sputtering Wei-Sheng Liu; Balaji G; Sui-Hua Wu; Li-Cheng Huang; Chung-Kai Chi; Yu-Lun Jiang; Hsing-Chun Kuo
元智大學 Sep-22 Optimal Growth Conditions for Forming c-Axis (002) Aluminum Nitride Thin Films as a Buffer Layer for Hexagonal Gallium Nitride Thin Films Produced with In Situ Continual Radio Frequency Sputtering Wei-Sheng Liu; Balaji G; Sui-Hua Wu; Li-Cheng Huang; Chung-Kai Chi; Yu-Lun Jiang; Hsing-Chun Kuo
元智大學 Sep-22 Optimal Growth Conditions for Forming c-Axis (002) Aluminum Nitride Thin Films as a Buffer Layer for Hexagonal Gallium Nitride Thin Films Produced with In Situ Continual Radio Frequency Sputtering Wei-Sheng Liu; Balaji G; Sui-Hua Wu; Li-Cheng Huang; Chung-Kai Chi; Yu-Lun Jiang; Hsing-Chun Kuo
元智大學 Dec-21 Effect of Nitrogen ratio on the Growth of High Quality AlN on Si<111> Substrate by RF Magnetron Sputtering Yu-Lun Jiang; Wei-Sheng Liu; Sui-Hua Wu; Balaji G; Chung-Kai Chi; Li-Cheng Huang
元智大學 Dec-21 The effects of growth temperatures on the growth of high quality AlN (002) thin films on Si (111) substrate by RF magnetron sputtering Sui-Hua Wu; Wei-Sheng Liu; Li-Cheng Huang; Chung-Kai Chi; Balaji G; Yu-Lun Jiang
元智大學 2022 Optimal growth conditions for forming c-axis (002) aluminum nitride thin films as a buffer layer for hexagonal gallium nitride thin films produced with in situ continual radio frequency sputtering Wei-Sheng Liu; Balaji. G; Sui-Hua Wu; Li-Cheng Huang; Chung-Kai Chi; Yu-Lun Jiang; Hsing-Chun Kuo
元智大學 2020/12/3 Use of DC reactive magnetron sputtering to grow high-quality AlN on Si<111> substrate Sui-Hua Wu; Wei-Sheng Liu; Yu-Lun Jiang; Chung-Kai Chi

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