臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立臺灣科技大學	2018	2-DOF in-Plane Displacement Measurement by Wollaston Prism-based Interferometer	Hsieh H.-L.; Lee J.-Y.; Sun B.-Y.; Fan G.-Y.
國立臺灣科技大學	2018	Focusing type grating interferometer	Liao J.-X.; Sun B.-Y.; Hsieh H.-L.
國立臺灣科技大學	2017	Full-field wafer warpage measurement technique	Hsieh, Hsieh H.L.;Lee, J.Y.;Huang, Y.G.;Liang, A.J.;Sun, B.Y.

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