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國立交通大學 2014-12-12T02:19:22Z 以濺鍍方式沉積鎢-矽-氮擴散障礙層在銅金屬化應用上之研究 陳重安; Chen, Chong-An; 林鵬; 孫喜眾; Lin, Peng; Sun, Xi-Zhong

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