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國立交通大學 |
2020-02-02T23:55:33Z |
Scheduling and Control of a Wafer Transfer Robot for Foundry Equipment Innovation Competition
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Song, Kai-Tai; Ou, Song-Qing; Yang, Cheng-An; Sun, Yu-Xuan; Kang, Li-Ren; Wang, Zhen-Yu; Wang, Yu-Shin; Lu, Pei-Chun; Ko, Chun-Long; Chen, Yao Hsiang |
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