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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
中原大學 2002-12 Highly Textured AlN Thin Films Deposited on SiO/sub 2//Si and GaN Using Helicon Sputtering System Sung, T. T.;Chen, S. W.;Wu, T. C.;Kao, H. L.;Chen, Jyh-Shin
中原大學 2002-12 Modeling and Design of AlN Piezoelectric Thin Film Layered SAW Devices Chen, S. W.;Sung, T. T.;Wu, T. C.;Kao, H. L.
中原大學 2002-12 The Study of Aluminum Nitride Thin Films for SAW Devices Chen, S. W.;Sung, T. T.;Wu, T. C.;Kao, H. L.;Chen, Jyh-Shin

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