臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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"szetsen steven lee"

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Institution	Date	Title	Author
中原大學	2004-05-04	Method and system of frequency modulated end-point detection	Szetsen Steven Lee
中原大學	2003-09-30	Spectroscopic method and related apparatus for measuring electrode gap distance	Szetsen Steven Lee
中原大學	2002-09-17	Optical temperature measurement as an in situ monitor of etch rate	Szetsen Steven Lee
中原大學	2002-08-27	Method of profile control in metal etching	Szetsen Steven Lee
中原大學	2000-05-30	In-situ and non-intrusive method for monitoring plasma etch chamber condition utilizing spectroscopic technique	Szetsen Steven Lee
中原大學	2000-05-16	Fabrication of field emitting tips	Szetsen Steven Lee
中原大學	2000-04-18	In-situ particle monitoring	Szetsen Steven Lee
中原大學	2000-02-08	Simultaneous in-situ optical sensing of pressure and etch rate in plasma etch chamber	Szetsen Steven Lee
中原大學	1994	Growth of diamond from atomic hydrogen and a supersonic free jet of methyl radicals	Szetsen Steven Lee;David W. Minsek;Daniel J. Vestyck;Peter Chen

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