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Showing items 111-135 of 180 (8 Page(s) Totally)
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Institution	Date	Title	Author
國立中山大學	2004	Structrual characteristics and interfacial reactions of low dielectric constant porous polysilazane for Cu metallization	J.H. Wang;P.T. Liu;T.C. Chang;L.J. Chen
國立中山大學	2004	CMP of ultra low-k Methylsilsesquiazane with oxygen plasma treatment for multilevel interconnect applications	T.C. Chang;T.M. Tsai;P.T. Liu;C.W. Chen;S.T. Yan;H. Aoki;T.Y. Tseng
國立中山大學	2004	Method to improve chemical-mechanical-planarization polishing rate of low-k methyl-silsesquiazane for ultralarge scale integraged interconnect application	T.C. Chang;T.M. Tsai;P.T. Liu;Y.C. Chang;J. Aoki;S.M. Sze;T.Y. Tseng
國立中山大學	2004	Quasisuperlattice storage: A concept of multilevel charge stoage	T.C. Chang;S.T. Yan;P.T. Liu;C.W. Chen;H.H. Wu;S.M. Sze
國立中山大學	2004	Cu-penetration induced breakdown mechanism for a-SiCN	C.W. Chen;P.T. Liu;T.C. Chang;J.H. Yang;T.M. Tsai;H.H. Wu;T.Y. Tseng
國立中山大學	2004	Leakage behavior of the quasi-superlattice stack for multilevel charge storage	T.C. Chang;S.T. Yan;P.T. Liu;C.W. Chen;H.H. Wu;S.M. Sze
國立中山大學	2004	Investigation of the electrical properties and reliability of amorphous SiCN	C.W. Chen;T.C. Chang;P.T. Liu;T.M. Tsai;C.H. Huang;J.M. Chen;T.Y. Tseng
國立中山大學	2004	Short-Channel Poly-Si thin film transistors with ultrathin chanel and self-alinged tungsten-clad source/drain	H.W. Zan;T.C. Chang;S.P. Shih;D.Z. Peng;P.Y. Kuo;T.Y. Huang;C.Y.C. Chang;P.T. Liu
國立中山大學	2004	Quasisuperlattice storage: A concept of multilevel charge stoage	T.C. Chang;S.T. Yan;P.T. Liu;C.W. Chen;H.H. Wu;S.M. Sze
國立中山大學	2004	A method of fabricating superior oxide/nitride/oxide gate stack	T.C. Chang;S.T. Yan;P.T. Liu;C.W. Chen;S.H. Lin;S.M. Sze
國立中山大學	2004	High performance polycrystalline silicon thin film transistor with multiple nano-wire channels and LDD structure	Y.C. Wu;T.C. Chang;P.T. Liu;H.W. Zan;Y.H. Tai
國立中山大學	2004	Silicide formation of Au thin films on (100) Si during annealing	J.F. Chang;T.R. Young;Y. Yang;H.Y. Ueng;T.C. Chang
國立中山大學	2004	A novel approach for fabricating germanium nanocrystals for nonvolatile memory application	T.C. Chang;S.T. Yan;P.T. Liu;C.W. Chen;S.H. Lin;S.M. Sze
國立中山大學	2004	Study on eching profile of nanoporous silica	C.W. Chen;T.C. Chang;P.T. Liu;T.S. Tsai;H.H. Wu;T.Y. Tseng
國立中山大學	2004	Study on the effect of electron beam curing on low-K porous organosilicate glass (OSG) material	T.C. Chang;T.M. Tsai;P.T. Liu;C.W. Chen;T.Y. Tseng
國立中山大學	2004	Study on SONOS nonvolatile memeory technology using high-density plasma chemical vapor deposition	T.C. Chang;S.T. Yan;P.T. Liu;C.W. Chen;S.H. Lin;S.M. Sze
國立中山大學	2004	Pattern profile distortion and stress evolution in nanoporous organosilicates after photoresist stripping	P.T. Liu;T.C. Chang;C.W. Chen;T.Y. Tseng
國立中山大學	2004	Memory effect of oxide/SiC:O/Oxide sandwidthed structures	T.C. Chang;S.T. Yan;F.M. Yang;P.T. Liu;S.M. Sze
臺大學術典藏	2003-05	An Internet-Based Multimedia Information Kiosk System for Intelligent Security Robot	R. C. Luo; T. C. Chang; K. L. Su; REN-CHYUAN LUO
修平科技大學	2003	The synergistic effect of N2/H2 gases in the plasma passivation of siloxane-based low-k polymer films’	S. T. Chen;G. S. Chen;T. J. Yang;T. C. Chang;W. H. Yang
中原大學	2003	Miscibility and dynamics of the poly(vinylimidazole-co-methyl methacrylate)–silica hybrids studied by solid-state NMR	Y. S. Chiu;K. H. Wu;T. C. Chang
中原大學	2003	Organic-inorganic hybrid materials X: characterization and degradation of hydroxyl-containing fluorinated polyimide-silica hybrids	T.C. Chang;G.P. Wang;H.C. Tsai;Y.S. Chiu;Y.S. Hong
國立中山大學	2003	Direct Patterning of Low-k Hydrogen Silsesquioxane Using X-ray Exposure Technology	T.C. Chang;T.M. Tsai;P.T. Liu;Y.S. Mor;C.W. Chen;J.T. Sheu;T.Y. Tseng
國立中山大學	2003	The synergistic effects of N2/H2 gases in the plasma passivation of siloxane based low-k polymer films	S.T. Chen;G.S. Chen;T.J. Yang;T.C. Chang;W.H. Yang
國立中山大學	2003	A study of parasitic resistance effects in thin-channel polycrystalline silicon TFTs with tungsten-clad source/drain	H.W. Zan;T.C. Chang;S.P. Shih;D.Z. Peng;P.Y. Kuo;T.Y. Huang;C.Y.C. Chang;P.T. Liu

Showing items 111-135 of 180 (8 Page(s) Totally)
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