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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
中原大學 2002-5 Abatement of CF4, C2F6, and CHF3 in Microwave Generated Surface Wave Plasmas. T. C. Wei;Y. S. Fang;
中原大學 2002 A Comparative Study of Ammonia/Hydrocarbon and Nitrogen/Hydrocarbon Plasma Polymer for Oxygen/Nitrogen Separation T. C. Wei;S. W. Yang;
中原大學 2002 Design, Preparation and Application of High Performance Membranes Lai, J. Y.;S. C. Chen;C. J. Chuang;R. C. Ruaan;T. C. Wei;K. L. Tung;Y. L. Liu
中原大學 2001-8 A New Atmospheric-Pressure PFC Abatement Process: Combined Plasma Catalysis H. W. Lee;M. B. Chang;S. J. Yu;T. C. Wei;
中原大學 2001-7 Removal of Gaseous Volatile Organic Compounds via Dielectric Barrier Discharge H. W. Lee;M. B. Chang;T. C. Wei;
中原大學 2001-4 Modeling Study on Plasma Reforming of Greenhouse Gases in a Silent Discharge T. C. Wei;H. F. Huang;C. C. Wu;
中原大學 2001-11 Two-dimensional Continuum Model of Inductively Coupled Ar/Cl2/BCl3 Plasmas with Comparisons to Experiments T. C. Wei;C. C. Yang;
中原大學 2001 Oxygen/Nitrogen Separation of TPX Membranes Modified by Acetylene/Nitrogen Plasmas T.-C. Wei;C.Y. Shih;R.C. Ruaan;J.Y. Lai;
中原大學 2000 Etching Characteristics of Organic Low-k Dielectrics in the Helicon-wave Plasma Etcher for 0.15 μm Damascene Architecture. J.M. Shieh;T.C. Wei;C.H. Liu;S.C. Suen;B.T. Dai
中原大學 2000 The Study on Thermal Stability of Fluorinated Amorphous Carbon Film (a-C:F) Deposited by PECVD. S.C. Suen;J.M. Shieh;M.S. Tsai;B.T. Dai;C.H. Liu;T.C. Wei;
中原大學 2000 Direct Conversion of Methane in Microwave Plasmas. T.C. Wei;S.F. Huang;C.B. Lee;
中原大學 1999 Sidenall-Fence-Free Pt Etching with Ar/O2 Mixed Gas Plasma T.C.Wei;M.C.Chiang;F.M.Pan;H.C.CHIEN;J.Sliu;H.K.Chiu;
中原大學 1999 Reactive Ion Etching of Ir Films with a TiN Mask in Ar/O2/BCl3 Helicon Wave Plasma T.C.Wei;M.C.Chiang;F.M.Pan;T.P.Liu;B.T.Dai;H.C.Chien;

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