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"tang ql tang qi lin"
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| 中國文化大學 |
2019-10 |
Mechanical property evaluation of ZrSiN films deposited by a hybrid superimposed high power impulse- medium frequency sputtering and RF sputtering system
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Tang, QL (Tang, Qi-Lin); Wu, YC (Wu, Yu-Chuan); Lou, BS (Lou, Bih-Show); Chen, ZY (Chen, Zhen-Yu); Lee, JW (Lee, Jyh-Wei) |
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