臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
南台科技大學	2008	The characteristics and residual stress of aluminum nitride films grown by two-stage sputtering of mid-frequency power	林天財;鄭錫恩;劉伍健; Tien-Chai Lin; Hsyi-En Cheng; Shih-Hung Tang; Wu-Chien Liu; Antony H.C. Lee
南台科技大學	2005	Structure and lattice parameters of TiN films grown by atomic-layer deposition	鄭錫恩; Hsyi-En Cheng; Wen-Jen Lee; Tien-Chai Lin
南台科技大學	2004	Oxidation resistance of atomic-layer deposited TiN films on thermal SiO2	鄭錫恩; Hsyi-En Cheng; Wen-Jen Lee; Tien-Chai Lin
南台科技大學	2003	Preparation of [0 0 2] oriented AlN thin films by mid frequency reactive sputtering technique	鄭錫恩; Hsyi-En Cheng; Tien-Chai Lin; Wen-Chien Chen

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