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Institution Date Title Author
國立臺灣大學 1993 Oxidation of Chemically Vapor-Deoposited Silicon Nitride in Dry Oxygen at 1923 to 2003 K 林瑞陽; Takayuki Narushima; Yasutaka Iguchi; Toshio Hirai; Lin, Ray Y.; Takayuki Narushima; Yasutaka Iguchi; Toshio Hirai

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