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國立交通大學 |
2014-12-08T15:13:09Z |
Work function tunability of refractory metal nitrides by lanthanum or aluminum doping for advanced CMOS devices
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Wang, Xin Peng; Lim, Andy Eu-Jin; Yu, Hong Yu; Li, Ming-Fu; Ren, Chi; Loh, WeiYip; Zhu, Chun Xiang; Chin, Albert; Trigg, Alastair David; Yeo, Yee-Chia; Biesemans, Serge; Lo, Guo-Qiang; Kwong, Dim-Lee |
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