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"tsai k y"的相關文件
顯示項目 31-40 / 99 (共10頁)
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| 臺大學術典藏 |
2020-01-17T07:45:17Z |
Using transmission line theory to calculate equivalent refractive index of EUV mask multilayer structures for efficient scattering simulation by finite-difference time-domain method
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Lee, Y.-M.; Li, J.-H.; Ng, P.C.W.; Pei, T.-H.; Wang, F.-M.; Tsai, K.-Y.; Chen, A.C.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:17Z |
Stochastic simulation of photon scattering for EUV mask defect inspection
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Pei, T.-H.; Tsai, K.-Y.; Li, J.-H.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:16Z |
Erratum: Fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects (Journal of Micro/ Nanolithography, MEMS, and MOEMS (2011) 10 (013004))
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Ng, P.C.W.; Tsai, K.-Y.; Lee, Y.-M.; Wang, F.-M.; Li, J.-H.; Chen, A.C.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:16Z |
Fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects
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Ng, P.C.W.; Tsai, K.-Y.; Lee, Y.-M.; Wang, F.-M.; Li, J.-H.; Chen, A.C.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:15Z |
Direct-scatterometry-enabled lithography model calibration
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Chen, C.-Y.; Tsai, K.-Y.; Shen, Y.-T.; Lee, Y.-M.; Li, J.-H.; Shieh, J.J.; Chen, A.C.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:14Z |
Void-based photonic crystal mirror with high reflectivity and low dissipation for extreme-ultraviolet radiation
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Lee, Y.-M.; Li, J.-H.; Tsai, K.-Y.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:13Z |
Direct-scatterometry-enabled optical-proximity-correction-model calibration
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JIA-HAN LI; Chen, A.C.; Shieh, J.J.; Li, J.-H.; Tsai, K.-Y.; Shen, Y.-T.; Liu, C.-H.; Ng, P.C.W.; Chen, C.-Y. |
| 臺大學術典藏 |
2020-01-17T07:45:12Z |
Simulation and experiment of speckle reduction by the beam splitting method on a pico-projection system
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Pei, T.-H.; Yeh, F.-C.; Tsai, K.-Y.; Li, J.-H.; Liu, Z.-R.; Hung, C.-L.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:12Z |
Direct-scatterometry-enabled PEC model calibration with two-dimensional layouts
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Yang, Y.-Y.; Lee, H.-P.; Liu, C.-H.; Yu, H.-Y.; Tsai, K.-Y.; Li, J.-H.; JIA-HAN LI |
| 臺大學術典藏 |
2020-01-17T07:45:12Z |
Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises
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Lee, Y.-M.; Li, J.-H.; Wang, F.-M.; Cheng, H.-H.; Shen, Y.-T.; Tsai, K.-Y.; Shieh, J.J.; Chen, A.C.; JIA-HAN LI |
顯示項目 31-40 / 99 (共10頁)
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