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"tsai kuen yu"的相關文件
顯示項目 11-27 / 27 (共1頁)
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| 臺大學術典藏 |
2011 |
Errata: Fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects
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Chen, Alek C.; Li, Jia-Han; Wang, Fu-Min; Lee, Yen-Min; Ng, Philip C.W.; Tsai, Kuen-Yu; Ng, Philip C.W.; Tsai, Kuen-Yu; Lee, Yen-Min; Wang, Fu-Min; Li, Jia-Han; Chen, Alek C. |
| 國立臺灣大學 |
2010 |
Stochastic Simulation of Photon Propagation in Si for Extreme-Ultraviolet Mask-Defect Inspection
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Pei, Ting-Hang; Tsai, Kuen-Yu; Li, Jia-Han |
| 國立臺灣大學 |
2010 |
Manufacturability analysis of a MEMS-based electron-optical system design for direct-write lithography
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Chen, Sheng-Yung; Chen, Shin-Chuan; Chen, Hsing-Hong; Pei, Ting-Han; Tsai, Kuen-Yu |
| 國立臺灣大學 |
2010 |
Fresnel zone plate manufacturability analysis for direct-write lithography by simulating focusing and patterning performance versus fabrication errors
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Tsai, Kuen-Yu; Chen, Sheng-Yung; Pei, Ting-Han; Li, Jia-Han |
| 國立臺灣大學 |
2010 |
Efficient scattering simulations for equivalent extreme ultraviolet mask multilayer structures by modified transmission line theory and finite-difference time-domain method
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Lee, Yen-Min; Li, Jia-Han; Ng, Philip C. W.; Pei, Ting-Hang; Wang, Fu-Min; Tsai, Kuen-Yu; Chen, Alek C. |
| 國立臺灣大學 |
2010 |
Stochastic simulation of photon propagation in Si for extreme-ultraviolet mask-defect inspection
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Pei, Ting-Hang; Tsai, Kuen-Yu; Li, Jia-Han |
| 國立臺灣大學 |
2008 |
Design of automatic controllers for model-based OPC with optimal resist threshold determination for improving correction convergence
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Su, Yi-Sheng; Ng, Philip C. W.; Tsai, Kuen-Yu; Chen, Yung-Yaw |
| 臺大學術典藏 |
2008 |
Design of automatic controllers for model-based OPC with optimal resist threshold determination for improving correction convergence
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Su, Yi-Sheng; Ng, Philip C. W.; Tsai, Kuen-Yu; Chen, Yung-Yaw; Su, Yi-Sheng; Ng, Philip C. W.; Tsai, Kuen-Yu; Chen, Yung-Yaw |
| 國立臺灣大學 |
2006 |
A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography
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Hu, Ni; Tay, Arthur; Tsai, Kuen-Yu |
| 國立臺灣大學 |
2005-10 |
On the Sensitivity Improvement and Cross-correlation Methodology for Confocal EUV Mask Blank Defect Inspection Tool Fleet
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蔡坤諭; Gullikson, Eric; Kearney, Patrick, Stivers, Alan R.; Tsai, Kuen-Yu; Gullikson, Eric; Kearney, Patrick, Stivers, Alan R. |
| 國立臺灣大學 |
2005-03 |
Modeling the defect inspection sensitivity of a confocal microscope
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Gullikson, Eric M.; Tejnil, Edita; 蔡坤諭; Stivers, Alan R.; Kusunose, H.; Gullikson, Eric M.; Tejnil, Edita; Tsai, Kuen-Yu; Stivers, Alan R.; Kusunose, H. |
| 國立臺灣大學 |
2005-03 |
Real-time control of photoresist absorption coefficient uniformity
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Tay, Arthur; Ho, Weng-Khuen; Wu, Xiaodong; 蔡坤諭; Tay, Arthur; Ho, Weng-Khuen; Wu, Xiaodong; Tsai, Kuen-Yu |
| 國立臺灣大學 |
2004-11 |
DQIT: /spl mu/-synthesis without D-scale fitting
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蔡坤諭; Hindi, Haitham A.; Tsai, Kuen-Yu; Hindi, Haitham A. |
| 國立臺灣大學 |
2004-09 |
Design of feedforward filters for improving tracking performances of existing feedback control systems
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蔡坤諭; Schaper, Charles D.; Kailath, Thomas; Tsai, Kuen-Yu; Schaper, Charles D.; Kailath, Thomas |
| 國立臺灣大學 |
2002-05 |
Design of feedforward filters for improving tracking performances of existing feedback control systems
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蔡坤諭; Schaper, Charles D.; Kailath, Thomas; Tsai, Kuen-Yu; Schaper, Charles D.; Kailath, Thomas |
| 國立臺灣大學 |
2002-05 |
DQIT: /spl mu/-synthesis without D-scale fitting
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蔡坤諭; Hindi, Haitham A.; Tsai, Kuen-Yu; Hindi, Haitham A. |
| 國立臺灣大學 |
1999-11 |
Servo system design of a high-resolution piezo-driven fine stage for step-and-repeat microlithography systems
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蔡坤諭; Yen, Jia-Yush; Tsai, Kuen-Yu; Yen, Jia-Yush |
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