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Institution Date Title Author
國立成功大學 2006-04-27 Global and local residual stress in silicon carbide films produced by plasma-enhanced chemical vapor deposition Chung, Chen-Kuei; Lin, Tzu-Yin; Duh, Jenq-Gong; Tsai, Ming-Qun
國立成功大學 2005-01 Fabrication and characterization of amorphous Si films by PECVD for MEMS Chung, Chen-Kuei; Tsai, Ming-Qun; Tsai, Po-Hao; Lee, Chiapyng
國立成功大學 2004-07-19 碳化矽/碳微奈米複合薄膜製程與性質檢測之研究 蔡名琨; Tsai, Ming-Qun
國立成功大學 2004-07-19 碳化矽/碳微奈米複合薄膜製程與性質檢測之研究 蔡名琨; Tsai, Ming-Qun

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