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| 國立成功大學 |
2004-10 |
Study of mechanical properties of PVD ZrN films, deposited under positive and negative substrate bias conditions
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Chen, Cheng-Shi; Liu, Chuan-Pu; Tsao, C. Y.A.; Yang, Heng-Ghieh |
| 國立成功大學 |
2004-09 |
Influence of substrate bias on practical adhesion, toughness, and roughness of reactive dc-sputtered zirconium nitride films
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Chen, Cheng-Shi; Liu, Chuan-Pu; Yang, Heng-Ghieh; Tsao, C. Y. A. |
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