臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立成功大學	2004-10	Study of mechanical properties of PVD ZrN films, deposited under positive and negative substrate bias conditions	Chen, Cheng-Shi; Liu, Chuan-Pu; Tsao, C. Y.A.; Yang, Heng-Ghieh
國立成功大學	2004-09	Influence of substrate bias on practical adhesion, toughness, and roughness of reactive dc-sputtered zirconium nitride films	Chen, Cheng-Shi; Liu, Chuan-Pu; Yang, Heng-Ghieh; Tsao, C. Y. A.

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