臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立交通大學	2019-04-03T06:47:05Z	A thin FinFET Si-fin body structure fabricated with 193nm scanner photolithography and composite hard mask etching technique upon bulk-Si substrate	Liao, Wen-Shiang; Liu, Yu-Huan; Chang, Wen-Tung; Chen, Tung-Hung; Shih, Tommy; Tsen, Huan-Chiu; Chung, Lee

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