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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
國立交通大學 2019-04-02T05:58:40Z Process optimization of plasma-enhanced chemical vapor deposited passivation thin films for improving nonvolatile memory IC performance Lin, CF; Tseng, WT; Feng, MS
國立交通大學 2017-04-21T06:56:10Z Chemical mechanical polishing for selective CVD-W Wang, MT; Yeh, WK; Tsai, MS; Tseng, WT; Chang, TC; Chen, LJ; Chen, MC
國立交通大學 2017-04-21T06:55:33Z Chemical mechanical polishing for selective CVD-W Wang, MT; Yeh, WK; Tsai, MS; Tseng, WT; Chang, TC; Chen, LJ; Chen, MC
國家衛生研究院 2016-10-12 Circulating 25-hydroxyvitamin D and physical performance in older adults: A nationwide study in Taiwan Chuang, SC;Chen, HL;Tseng, WT;Wu, IC;Hsu, CC;Chang, HY;Chen, YI;Lee, MM;Liu, K;Hsiung, CA
國家衛生研究院 2015-10 Vitamin D, its determinants, and physical performances in the healthy aging longitudinal study in Taiwan (HALST) Chuang, SC;Chen, HL;Chang, HY;Lee, MM;Tseng, WT;Wu, IC;Hsu, CC;Liu, K;Hsiung, CA
國立交通大學 2014-12-08T15:47:23Z A modified multi-chemical spray cleaning process for post shallow trench isolation chemical mechanical polishing cleaning application Wang, YL; Wang, TC; Wu, J; Tseng, WT; Lin, CF
國立交通大學 2014-12-08T15:47:22Z Process optimization of plasma-enhanced chemical vapor deposited passivation thin films for improving nonvolatile memory IC performance Lin, CF; Tseng, WT; Feng, MS
國立交通大學 2014-12-08T15:46:44Z Optimization of multilayer thin film passivation processes for improving cache memory device performance Lin, CF; Tseng, WT; Feng, MS
國立交通大學 2014-12-08T15:46:40Z Process optimization and integration for silicon oxide intermetal dielectric planarized by chemical mechanical polish Lin, CF; Tseng, WT; Feng, MS
國立交通大學 2014-12-08T15:46:39Z A comparative study on the roles of velocity in the material removal rate during chemical mechanical polishing Tseng, WT; Chin, JH; Kang, LC
國立交通大學 2014-12-08T15:46:28Z A ULSI shallow trench isolation process through the integration of multilayered dielectric process and chemical-mechanical planarization Lin, CF; Tseng, WT; Feng, MS; Wang, YL
國立交通大學 2014-12-08T15:46:06Z Effects of film stress on the chemical mechanical polishing process Tseng, WT; Wang, YH; Chin, JH
國立交通大學 2014-12-08T15:35:42Z Modified polycrystalline silicon chemical-vapor deposition process for improving roughness at oxide/polycrystalline silicon interface Chang, JJ; Hsieh, TE; Wang, YL; Tseng, WT; Liu, CP; Lan, CY
國立交通大學 2014-12-08T15:27:24Z Modified double-layer PECVD passivation films for improving nonvolatile memory IC performance Lin, CF; Tseng, WT; Feng, MS; Chang, YF
國立交通大學 2014-12-08T15:27:17Z ULSI multi-layer thin film passivation processes for improving cache memory performance Lin, CF; Tseng, WT; Feng, MS; Chang, YF; Hsu, JJ
國立交通大學 2014-12-08T15:02:52Z Modeling of the wear mechanism during chemical-mechanical polishing Liu, CW; Dai, BT; Tseng, WT; Yeh, CF
國立交通大學 2014-12-08T15:02:11Z Effects of mechanical characteristics on the chemical-mechanical polishing of dielectric thin films Tseng, WT; Liu, CW; Dai, BT; Yeh, CF
國立交通大學 2014-12-08T15:02:02Z Re-examination of pressure and speed dependences of removal rate during chemical-mechanical polishing processes Tseng, WT; Wang, YL
國立交通大學 2014-12-08T15:02:01Z CMP of fluorinated silicon dioxide: Is it necessary and feasible? Tseng, WT; Hsieh, YT; Lin, CF
國立交通大學 2014-12-08T15:01:58Z Chemical-mechanical polishing and material characteristics of plasma-enhanced chemically vapor deposited fluorinated oxide thin films Tseng, WT; Hsieh, YT; Lin, CF; Tsai, MS; Feng, MS
國立交通大學 2014-12-08T15:01:30Z Integration of modified plasma-enhanced chemical vapor deposited tetraethoxysilane intermetal dielectric and chemical-mechanical polishing processes for 0.35 mu m IC device reliability improvement Wang, YL; Tseng, WT; Feng, MS
國立交通大學 2014-12-08T15:01:23Z Effects of corrosion environments on the surface finishing of copper chemical mechanical polishing Wang, MT; Tsai, MS; Liu, C; Tseng, WT; Chang, TC; Chen, LJ; Cheng, MC
國立交通大學 2014-12-08T15:01:23Z Chemical-mechanical polishing of low-dielectric-constant spin-on-glasses: film chemistries, slurry formulation and polish selectivity Wang, YL; Liu, C; Chang, ST; Tsai, MS; Feng, MS; Tseng, WT
國立交通大學 2014-12-08T15:01:23Z Chemical mechanical polishing for selective CVD-W Wang, MT; Yeh, WK; Tsai, MS; Tseng, WT; Chang, TC; Chen, LJ; Chen, MC
國立交通大學 2014-12-08T15:01:09Z The exothermic reaction and temperature measurement for tungsten CMP technology and its application on endpoint detection Wang, YL; Liu, C; Feng, MS; Tseng, WT

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