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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
國立交通大學 2014-12-08T15:47:23Z A modified multi-chemical spray cleaning process for post shallow trench isolation chemical mechanical polishing cleaning application Wang, YL; Wang, TC; Wu, J; Tseng, WT; Lin, CF
國立交通大學 2014-12-08T15:47:22Z Process optimization of plasma-enhanced chemical vapor deposited passivation thin films for improving nonvolatile memory IC performance Lin, CF; Tseng, WT; Feng, MS
國立交通大學 2014-12-08T15:46:44Z Optimization of multilayer thin film passivation processes for improving cache memory device performance Lin, CF; Tseng, WT; Feng, MS
國立交通大學 2014-12-08T15:46:40Z Process optimization and integration for silicon oxide intermetal dielectric planarized by chemical mechanical polish Lin, CF; Tseng, WT; Feng, MS
國立交通大學 2014-12-08T15:46:39Z A comparative study on the roles of velocity in the material removal rate during chemical mechanical polishing Tseng, WT; Chin, JH; Kang, LC
國立交通大學 2014-12-08T15:46:28Z A ULSI shallow trench isolation process through the integration of multilayered dielectric process and chemical-mechanical planarization Lin, CF; Tseng, WT; Feng, MS; Wang, YL
國立交通大學 2014-12-08T15:46:06Z Effects of film stress on the chemical mechanical polishing process Tseng, WT; Wang, YH; Chin, JH
國立交通大學 2014-12-08T15:35:42Z Modified polycrystalline silicon chemical-vapor deposition process for improving roughness at oxide/polycrystalline silicon interface Chang, JJ; Hsieh, TE; Wang, YL; Tseng, WT; Liu, CP; Lan, CY
國立交通大學 2014-12-08T15:27:24Z Modified double-layer PECVD passivation films for improving nonvolatile memory IC performance Lin, CF; Tseng, WT; Feng, MS; Chang, YF
國立交通大學 2014-12-08T15:27:17Z ULSI multi-layer thin film passivation processes for improving cache memory performance Lin, CF; Tseng, WT; Feng, MS; Chang, YF; Hsu, JJ

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