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Institution Date Title Author
南台科技大學 2020-03 The development of a monitoring system for analyzing factors affecting film thickness in a sputtering process Cheng-Hsueh Chou;You-Teh Lin;Swapnil Shinde;Ci-En Huang;Tsung-Chien Wu;Keh-Moh Lin;Wen-Tse Hsiao

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