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Institution Date Title Author
臺大學術典藏 2013 Effects of etching holes on complementary metal oxide semiconductor-microelectromechanical systems capacitive structure Chang, Pei-Zen; Lee, Chih-Kung; Tu, Wei-Hsiang;Chu, Wen-Chang;Lee, Chih-Kung;Chang, Pei-Zen;Hu, Yuh-Chung; Tu, Wei-Hsiang; Chu, Wen-Chang; Hu, Yuh-Chung; CHIH-KUNG LEE
臺大學術典藏 2013 Effects of etching holes on complementary metal oxide semiconductor-microelectromechanical systems capacitive structure Chang, Pei-Zen; Lee, Chih-Kung; Tu, Wei-Hsiang;Chu, Wen-Chang;Lee, Chih-Kung;Chang, Pei-Zen;Hu, Yuh-Chung; Tu, Wei-Hsiang; Chu, Wen-Chang; Hu, Yuh-Chung; CHIH-KUNG LEE

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