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Institution Date Title Author
國立交通大學 2014-12-08T15:46:27Z Effects of O-2- and N2O-plasma treatments on properties of plasma-enhanced-chemical-vapor-deposition tetraethylorthosilicate oxide Chen, YC; Yang, MZ; Tung, IC; Chen, MP; Feng, MS; Cheng, HC; Chang, CY
國立交通大學 2014-12-08T15:46:08Z Nitric acid-based slurry with citric acid as an inhibitor for copper chemical mechanical polishing Hu, TC; Chiu, SY; Dai, BT; Tsai, MS; Tung, IC; Feng, MS
國立交通大學 2014-12-08T15:46:07Z Effects of methyl silsesquioxane electron-beam curing on device characteristics of logic and four-transistor static random-access memory Lin, CF; Tung, IC; Feng, MS
國立交通大學 2014-12-08T15:44:44Z Characterization of excimer-laser-annealed polycrystalline silicon films grown by ultrahigh-vacuum chemical vapor deposition Chen, YC; Wu, YCS; Tung, IC; Chao, CW; Feng, MS; Chen, HC
國立交通大學 2014-12-08T15:27:11Z A study on electrochemical metrologies for evaluating the removal selectivity of AlCMP Chiu, SY; Hsu, JW; Tung, IC; Shih, HC; Feng, MS; Tsai, MS; Dai, BT
國立交通大學 2014-12-08T15:27:05Z Study on chemical-mechanical polishing of low dielectric constant polyimide thin films Tai, YL; Tsai, MS; Tung, IC; Dai, BT; Feng, MS

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