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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Repositories
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2019臺灣學術機構典藏
研討會
機構典藏系統RC7版本已
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Institution Date Title Author
中原大學 2002-04-23 Multiple etch contact etching method incorporating post contact etch etching Tzu-Shih Yen;Erik S. Jeng;I-Ping Lee;Eddy Chiang
中原大學 2001-10-23 Method for forming self-aligned contact with liner Tzu-Shih Yen;Erik S. Jeng;Hsiao-Chin Tuan;Chun-Yao Chan;Eddy Chiang;Wen-Shiang Liao
中原大學 2001-07-24 Method for forming self-aligned contacts using a hard mask Tzu-Shih Yen;Erik S. Jeng;Hao-Chieh Liu;Hung-Yi Luo
中原大學 2001-05-22 Method for forming a semiconductor device Erik S. Jeng;Tzu-Shih Yen;Chi-San Wu;Jong-Bor Wang
中原大學 2000-10-31 Method for eliminating CMP induced microscratches Fu-Liang Yang;Bih-Tiao Lin;Tzu-Shih Yen;Bi-Ling Chen;Erik S. Jeng
中原大學 2000-10-24 Method to fabricate capacitor structures with very narrow features using silyated photoresist Tzu-Shih Yen;Erik S. Jeng
中原大學 2000-09-26 Method for fabricating ultra-small interconnections using simplified patterns and sidewall contact plugs Erik S. Jeng;Tzu-Shih Yen;Hung-Yi Luo
中原大學 1999-11-30 Method of fabricating contact holes in high density integrated circuits using taper contact and self-aligned etching processes Fu-Liang Yang;Tzu-Shih Yen;鄭湘原
中原大學 1999-10-05 Method for controlling linewidth by etching bottom anti-reflective coating Tzu-Shih Yen;鄭湘原
中原大學 1998-07-14 Method for manufacturing crown-shaped capacitors for dynamic random access memory integrated circuits Erik S. Jeng;Tzu-Shih Yen
中原大學 1997-11-18 Method of manufacturing a DRAM cell having a double-crown capacitor using polysilicon and nitride spacers Kung Linliu;Erik Syangywan Jeng;Tzu-Shih Yen

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