臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立交通大學	2014-12-12T02:50:39Z	利用PECVD沉積之低介電常數SiOF薄膜在深次微米積體電路之應用研究	吳鈞; Wu, Jiung; 郭正次; Kuo, Cheng-Tzu
國立交通大學	2014-12-08T15:06:58Z	Effect of fluorine flow and deposition temperature on physical characteristics and stability of fluorine-doped siloxane-based low-dielectric-constant material	Cheng, Yi-Lung; Wu, Jiung; Chiu, Tai-Jung

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