臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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	Repositories
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	2019臺灣學術機構典藏研討會
	機構典藏系統RC7版本已發佈

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	臺大學術典藏NTU Scholars

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Institution	Date	Title	Author
臺大學術典藏	2020-03-06T03:42:42Z	Run-To-run control of CMP process considering aging effects of pad and disc	Chen A.; Guo R.-S.; Chou Y.L.; Lin C.L.; Dun J.; Wu S.A.; RUEY-SHAN GUO
臺大學術典藏	2020-03-02T06:40:00Z	Run-To-run control of CMP process considering aging effects of pad and disc	Chen, A.; Guo, R.-S.; Chou, Y.L.; Lin, C.L.; Dun, J.; Wu, S.A.; ARGON CHEN
國立臺灣大學	1999-10	Run-to-run control of CMP process considering aging effects of pad and disc	Chen, Argon; Guo, Ruey-Shan; Chou, Y.L.; Lin, C.L.; Dun, Jowei; Wu, S.A.

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