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Institution Date Title Author
國立中山大學 2005 Improvement of reliability for polycrystalline thin film transistor using self-aligned fluorinated silica glass spacers C.H. Tu;T.C. Chang;P.T. Liu;H.W. Zan;Y.H. Tai;Y.C. Wu;C.Y. Chang
國立中山大學 2005 Damage effect of fluorine implantation on PECVD alpha-SiOC barrier dielectric F.M. Yang;T.C. Chang;P.T. Liu;C.W. Chen;Y.H. Tai;J.C. Lou
國立中山大學 2005 Effects of channel width on electrical characteristics of polysilicon TFTs with nanowire channel Y.C. Wu;T.C. Chang;P.T. Liu;C.S. Chen;C.H. Tu;H.W. Zan;Y.H. Tai;C.Y. Chang
國立中山大學 2005 Enhanced performance of poly-Si thin film transistors using fluorine ion implantation C.H. Tu;T.C. Chang;P.T. Liu;H.W. Zan;Y.H. Tai;Y.C. Wu;C.Y. Chang
國立中山大學 2004 High performance polycrystalline silicon thin film transistor with multiple nano-wire channels and LDD structure Y.C. Wu;T.C. Chang;P.T. Liu;H.W. Zan;Y.H. Tai

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